Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication

Plasma Electronics, Second Edition:Applications in Microelectronic Device Fabrication

by: Makabe, Toshiaki; Petrovic, Zoran Lj

Publisher: Taylor and Francis ( 2014-08-27 )

ISBN-13: 9781482222050

e-ISBN-13: 9781482222104

ISBN-10: 1482222051

Edition: 2

Language: English