Ultra Clean Processing of Semiconductor Surfaces VIII: Selected, Peer Reviewed Papers from the 8th Inteational Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) Held in Antwerp, Belgium, September 18-20, 2006

by: Mertens, Paul; Meuris, Marc; Heyns, Marc

Publisher: Trans Tech Publishers ( 2007/11/20 )

ISBN-13: 9783908451464

ISBN-10: 3908451469

Edition: 1

Language: English

Category: Engineering; Engineering: Electrical