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Thin Films Material Technology: Sputtering of Compound Mater

2015-05-28 分类:物理学

Thin Films Material Technology: Sputtering of Compound Mater

by: Kiyotaka Wasa, Makoto Haber, Hideaki Adachi

Publisher: William Andrew

Print length: 532

Publication Date: 2005-01-14

ISBN-10: 0815514832

ISBN-13: 9780815514831

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