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Thin Films From Free Atoms and Particles New Edition
Author(s): Kenneth Klabunde
- Publisher: Academic Press Inc
- Publication Date: 10 Jan. 1986
- Edition: New
- Language: English
- Print length: 376 pages
- ISBN-10: 0124107559
- ISBN-13: 9780124107557
Book Description
Thin Films from Free Atoms and Particles is an eight-chapter text that describes the primary reaction modes of atoms or coordination-deficient particles. This book presents first an introduction to free atoms and particles, followed by a chapter describing the embryonic growth of films, such as dimers, trimers, and other small telomers formed and detected. The next chapters discuss the understanding of discharge processes for forming free atoms and particles. The remaining chapters deal with the technology, techniques, and materials in thin films. Physicists, engineers, materials scientists, and chemists will find this book of great value.
