Silicides for VLSI Applications

Silicides for VLSI Applications book cover

Silicides for VLSI Applications

Author(s): Shyam P. Murarka (Author)

  • Publisher: Academic Press
  • Publication Date: 27 Jun. 1983
  • Language: English
  • Print length: 200 pages
  • ISBN-10: 0125112203
  • ISBN-13: 9780125112208

Book Description

Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

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