
Scaling Issues and Design of MEMS
Author(s): Salvatore Baglio (Author), Salvatore Castorina (Author), Nicolo Savalli (Author)
- Publisher: John Wiley & Sons
- Publication Date: 31 Aug. 2008
- Language: English
- Print length: 248 pages
- ISBN-10: 0470034076
- ISBN-13: 9780470034071
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