Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS book cover

Scaling Issues and Design of MEMS

Author(s): Salvatore Baglio (Author), Salvatore Castorina (Author), Nicolo Savalli (Author)

  • Publisher: John Wiley & Sons
  • Publication Date: 31 Aug. 2008
  • Language: English
  • Print length: 248 pages
  • ISBN-10: 0470034076
  • ISBN-13: 9780470034071

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