Scaling Issues and Design of MEMS

Scaling Issues and Design of MEMS
Scaling Issues and Design of MEMS

by: Baglio, Prof Salvatore; Castorina, Prof Salvatore; Savalli, Prof Nicolo

Paperback: 245 pages

Publisher: John Wiley & Sons, Ltd.( October 27, 2008 )

ISBN-10: 047001699X