Reliability of MEMS: Testing of Materials and Devices

Reliability of MEMS: Testing of Materials and Devices
Authors: Tabata, Osamu; Tsuchiya, Toshiyuki; Brand, Oliver; Fedder , Gary K.; Hierold, Christofer; Korvink , Jan G.
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Publisher: Wiley(2013/3/26)
Edition: 1
Language: English
ISBN-10: 3527335013
ISBN-13: 9783527335015
e-ISBN-10: 3527675035
e-ISBN-13: 9783527675036

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