Reliability of MEMS:Testing of Materials and Devices

by: Tabata, Osamu; Tsuchiya, Toshiyuki; Brand, Oliver; Fedder , Gary K.; Hierold, Christofer; Korvink , Jan G.

Publisher: Wiley(2013/3/26)

Edition: 1

Language: English

ISBN-10: 3527335013

ISBN-13: 9783527335015

e-ISBN-10: 3527675035

e-ISBN-13: 9783527675036