Wow! eBook
TOPICS IN GROWTH AND DEVICE PROCESSING OF III-V SEMICONDUCTORS
Author(s): Cammy R Abernathy (Author), Chih Tang Sah (Author), F Ren (Author), Stephen J Pearton (Author)
- Publisher: World Scientific Publishing Company
- Publication Date: November 9, 1996
- Language: English
- Print length: 560 pages
- ISBN-10: 9810218842
- ISBN-13: 9789810218843
Book Description
This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.
