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Proceedings of the Tenth International Conference, Catania, Italy, 13-17 June 1994
Author(s): S. Coffa (Editor), G. Ferla (Editor), Francesco Priolo (Editor), E. Rimini (Editor)
- Publisher: Elsevier Science Ltd
- Publication Date: 1 May 1995
- Language: English
- Print length: 1030 pages
- ISBN-10: 0444821945
- ISBN-13: 9780444821942
Book Description
The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
