NEMS/MEMS Technology and Devices – ICMAT2009, ICMAT2009: Selected Peer Reviewed Papers from the Inteational Conference on Materials for Advanced Technologies 2009, Symposium L, 28 June – 3 July, Singapore

by: Teo, Selin; Liu, A. Q.; Li, H.

Publisher: Trans Tech Publishers ( 2009/6/3 )

ISBN-13: 9780878493210

ISBN-10: 0878493212

Edition: 1

Language: English

Category: Engineering