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MEMS and NEMS: Systems, Devices, and Structures

2015-06-01 分类:工程

MEMS and NEMS: Systems, Devices, and Structures

by: Sergey E. Lyshevski

Publisher: CRC

Print length: 480

Publication date: 2002-01-18

ISBN-10: 0849312620

ISBN-13: 9780849312625

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