MEMS and NEMS: Systems, Devices, and Structures
by: Sergey E. Lyshevski
Publisher: CRC
Print length: 480
Publication date: 2002-01-18
ISBN-10: 0849312620
ISBN-13: 9780849312625
MEMS and NEMS: Systems, Devices, and Structures
by: Sergey E. Lyshevski
Publisher: CRC
Print length: 480
Publication date: 2002-01-18
ISBN-10: 0849312620
ISBN-13: 9780849312625

