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Materials Science in Microelectronics II: The Effects of Structure on Properties in Thin Films: 2 2nd Edition
Author(s): Eugene Machlin (Author)
- Publisher: Elsevier Science
- Publication Date: 3 Dec. 2005
- Edition: 2nd
- Language: English
- Print length: 228 pages
- ISBN-10: 9780080446394
- ISBN-13: 9780080446394
Book Description
The subject matter of thin-films – which play a key role in microelectronics – divides naturally into two headings: the processing / structure relationship, and the structure / properties relationship. Part II of ‘Materials Science in Microelectronics’ focuses on the latter of these relationships, examining the effect of structure on the following: • Electrical properties• Magnetic properties• Optical properties• Mechanical properties• Mass transport properties• Interface and junction properties• Defects and properties
- Captures the importance of thin films to microelectronic development
- Examines the cause / effect relationship of structure on thin film properties
