Materials Processing by Cluster Ion Beams: History, Technology, and Applications

Materials Processing by Cluster Ion Beams: History, Technology, and Applications
Authors: Yamada, Isao
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Publisher: CRC Press(2015/7/21)
Language: English
ISBN-10: 1498711758
ISBN-13: 9781498711753
e-ISBN-10: 1498711766
e-ISBN-13: 9781498711760

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