Materials Processing by Cluster Ion Beams: History, Technology, and Applications

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Materials Processing by Cluster Ion Beams: History, Technology, and Applications

by: Yamada, Isao

Publisher: CRC Press(2015/7/21)

Language: English

ISBN-10: 1498711758

ISBN-13: 9781498711753

e-ISBN-10: 1498711766

e-ISBN-13: 9781498711760

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