Wow! eBook
Lithography: Main Techniques
Author(s): Stefan Landis
- Publisher: Wiley-ISTE
- Publication Date: 19 Nov. 2010
- Edition: 1st
- Language: English
- Print length: 320 pages
- ISBN-10: 184821202X
- ISBN-13: 9781848212022
Book Description
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.
Editorial Reviews
About the Author
Stefan Landis works at CEA-LETI-Minatec in Grenoble, France. He also lectures on next generation lithography in numerous engineering schools in France and in CEI-Europe Advanced Technology Education.
