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Ion Implantation Technology-94: Proceedings of the Tenth International Conference on Ion Implantation Technology Catania, Italy, June 13-17, 1994
Author(s): Italy) International Conference on Ion Implantation Technology (10th : 1994 : Catania (Author), Giuseppe Ferla (Editor), Francesco Priolo (Editor), Emanuele Rimini (Editor)
- Publisher: North-Holland
- Publication Date: January 1, 1995
- Language: English
- Print length: 1012 pages
- ISBN-10: 0444821945
- ISBN-13: 9780444821942
Book Description
The aim of these proceedings is to present the many subjects related to ion implantation. The presentations in this volume cover areas such as: trends in processing and devices; ion-solid interaction; materials science issues; advanced implanter systems; and future trends and applications.
