High Density Plasma Sources: Design, Physics and Performance
by: Oleg A. Popov
Publisher: William Andrew
Print length: 465
Publication Date: 1997-01-14
ISBN-10: 0815513771
ISBN-13: 9780815513773
High Density Plasma Sources: Design, Physics and Performance
by: Oleg A. Popov
Publisher: William Andrew
Print length: 465
Publication Date: 1997-01-14
ISBN-10: 0815513771
ISBN-13: 9780815513773
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