Gate Dielectric Integrity: Material, Process, and Tool Quali

Gate Dielectric Integrity: Material, Process, and Tool Quali
AuthorGeorge A. Brown (Editor) D. C. Gupta (Editor)

Publisher: ASTM Inteational

Print length: 176

Publication date: 2000-03-01

ISBN-10: 0803126158

ISBN-13: 9780803126152