Design, Modeling and Control of Nanopositioning Systems

Design, Modeling and Control of Nanopositioning Systems

by: Fleming, Andrew J.; Leang, Kam K

Publisher: Springer ( 2014-05-15 )

ISBN-13: 9783319066165

e-ISBN-13: 9783319066172

ISBN-10: 3319066161

Edition: 1

Language: English