Copper Electrodeposition for Nanofabrication of Electronics Devices

Copper Electrodeposition for Nanofabrication of Electronics Devices

by: Kondo, Kazuo; Akolkar, Rohan N.; Barkey, Dale P.; Yokoi, Masayuki

Publisher: Springer ( 2013-11-20 )

ISBN-13: 9781461491750

e-ISBN-13: 9781461491767

ISBN-10: 1461491754

Edition: 1

Language: English