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C H N and O in SI and Characterization and Simulation of Materials and Processes: Proceedings of Symposium N and Symposium G of the 1995 E-Mrs Spring …
Author(s): A. Borghesi (Editor), U.M. Gosele (Editor), A.M. Gue (Editor), M. Djafari-Rouhani (Editor)
- Publisher: Elsevier Science Ltd
- Publication Date: 31 July 1996
- Language: English
- Print length: 570 pages
- ISBN-10: 0444824138
- ISBN-13: 9780444824134
Book Description
This collection of symposia papers is divided into two sections. The first presents a state-of-the-art review of the topic – carbon, hydrogen, nitrogen, and oxygen in silicon and in other elemental superconductors. The second section deals with two areas: advanced instrumentation allowing for direct access to atomic mechanisms; and technological development, which, particularly in the field of microelectronics and microsystems, requires as a result of the miniaturization race, a precise mastery of the microscopic mechanisms.
