Chemical Mechanical Planarization of Microelectronic Materia

Chemical Mechanical Planarization of Microelectronic Materia

by: Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann

Publisher: -Interscience

Print length: 337

Publication date: 1997-02-07

ISBN-10: 0471138274

ISBN-13: 9780471138273