Wow! eBook
In Situ Characterization of Thin Film Growth
Author(s): Gertjan Koster (Editor), Guus Rijnders
- Publisher: Woodhead Publishing
- Publication Date: October 19, 2011
- Edition: 1st
- Language: English
- Print length: 296 pages
- ISBN-10: 9781845699345
- ISBN-13: 9781845699345
Book Description
Advanced techniques for characterizing thin film growth in situ help to develop improved understanding and faster diagnosis of issues with the process. In situ characterization of thin film growth reviews current and developing techniques for characterizing the growth of thin films, covering an important gap in research.Part one covers electron diffraction techniques for in situ study of thin film growth, including chapters on topics such as reflection high-energy electron diffraction (RHEED) and inelastic scattering techniques. Part two focuses on photoemission techniques, with chapters covering ultraviolet photoemission spectroscopy (UPS), X-ray photoelectron spectroscopy (XPS) and in situ spectroscopic ellipsometry for characterization of thin film growth. Finally, part three discusses alternative in situ characterization techniques. Chapters focus on topics such as ion beam surface characterization, real time in situ surface monitoring of thin film growth, deposition vapour monitoring and the use of surface x-ray diffraction for studying epitaxial film growth.With its distinguished editors and international team of contributors, In situ characterization of thin film growth is a standard reference for materials scientists and engineers in the electronics and photonics industries, as well as all those with an academic research interest in this area.
- Chapters review electron diffraction techniques, including the methodology for observations and measurements
- Discusses the principles and applications of photoemission techniques
- Examines alternative in situ characterisation techniques
Editorial Reviews
About the Author
Gertjan Koster is a Professor at the University of Twente in the Netherlands. He is also a visiting professor at the Joseph Stephan Institute in Slovenia. His current research focuses on the growth and study of artificial materials, the physics of reduced scale (nanoscale) materials, metal–insulator transitions, and in situ spectroscopic characterization.
Guus Rijnders is a Professor and Chairman of Inorganic Materials Science, University of Twente, Enschede, Netherlands. His research currently focuses on the integration of functional and smart materials with electronic and microelectromechanical systems (MEMS).
