Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications

by: Kääriäinen, Tommi; Cameron, David; Kääriäinen, Marja-Leena; Sherman, Arthur

Publisher: Wiley(2013/5/17)

Edition: 2

Language: English

ISBN-10: 1118062779

ISBN-13: 9781118062777

e-ISBN-13: 9781118747384