Advanced Ta-Based Diffusion Barriers for Cu Interconnects
by: Rene Hubner
Publisher: Nova Biomedical Books
Print length: 102
Publication date: 2008-05
ISBN-10: 1604564512
ISBN-13: 9781604564518
Advanced Ta-Based Diffusion Barriers for Cu Interconnects
by: Rene Hubner
Publisher: Nova Biomedical Books
Print length: 102
Publication date: 2008-05
ISBN-10: 1604564512
ISBN-13: 9781604564518