Resonant MEMS:Fundamentals, Implementation, and Application

by: Brand, Oliver; Dufour, Isabelle; Heinrich, Stephen; Josse, Fabien; Fedder , Gary K.; Hierold, Christofer; Korvink , Jan G.; Tabata, Osamu

Publisher: Wiley(2015/4/22)

Edition: 1

Language: English

ISBN-10: 3527335455

ISBN-13: 9783527335459

e-ISBN-13: 9783527676354