Plasma-Aided Nanofabrication: From Plasma Sources to Nanoass

Plasma-Aided Nanofabrication:From Plasma Sources to Nanoass

by: Ken Ostrikov, Shuyan Xu

Publisher: -VCH

Print length: 315

Publication Date: 2007-09-17

ISBN-10: 3527406336

ISBN-13: 9783527406333