Multi-Wafer Rotating MEMS Machines: Turbines, Generators, an
by: Jeffrey H. Lang
Print length: 456
Publication date: 2009-10-02
ISBN-10: 0387777466
ISBN-13: 9780387777467
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, an
by: Jeffrey H. Lang
Print length: 456
Publication date: 2009-10-02
ISBN-10: 0387777466
ISBN-13: 9780387777467

