Multi-Wafer Rotating MEMS Machines: Turbines,

2014-01-28 分类：未分类

Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines (MEMS Reference Shelf)

Hardcover: 456 pages

Publisher: Springer (October 1, 2009)

Language: English

ISBN-10: 0387777466

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