Wow! eBookMicromachined Thin-Film Sensors for SOI-CMOS Co-Integration
by: J. Laconte, D. Flandre, J.-P. Raskin
Print length: 292
Publication date: 2006-04-11
ISBN-10: 0387288422
ISBN-13: 9780387288420
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
