Micro Process Engineering: Fundamentals, Devices, Fabricatio

Micro Process Engineering: Fundamentals, Devices, Fabricatio

by: Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Publisher: -VCH

Print length: 529

Publication date: 2006-04-17

ISBN-10: 3527312463

ISBN-13: 9783527312467