Handbook of VLSI Microlithography, 2nd Edition: Principles, Tools, Technology and Applications
Authors: Helbert, John N.; Helbert, John N.
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Publisher: Elsevier Science(1989/12/1)
Edition: 2
Language: English
ISBN-10: 0815514441
ISBN-13: 9780815514442
e-ISBN-10: 0815517807
e-ISBN-13: 9780815517801
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