Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

by: Wasa, Kiyotaka

Publisher: Elsevier Science(2014/5/14)

Edition: 2

Language: English

ISBN-10: 1437734839

ISBN-13: 9781437734836

e-ISBN-10: 1437734847

e-ISBN-13: 9781437734843