Handbook of Physical Vapor Deposition (PVD) Processing
Authors: Mattox, Donald M.
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Publisher: Elsevier Science(2010/4/29)
Edition: 2
Language: English
ISBN-10: 0815520379
ISBN-13: 9780815520375
e-ISBN-10: 0815520387
e-ISBN-13: 9780815520382
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