Handbook of Chemical Vapor Deposition, 2nd Edition: Principles, Technology and Applications

by: Pierson, Hugh O.

Publisher: Elsevier Science(1995/12/1)

Edition: 2

Language: English

ISBN-10: 0815514328

ISBN-13: 9780815514329

e-ISBN-10: 0815517432

e-ISBN-13: 9780815517436