Gettering and Defect Engineering in Semiconductor Technology XV: Selected, Peer Reviewed Papers from the 15th Gettering and Defect Engineering in Semiconductor Technology (GADEST 2013), September 22-27, 2013, Oxford, UK
Authors: Murphy, J. D.
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Publisher: Trans Tech Publishers(2013/10/7)
Edition: 1
Language: English
ISBN-10: 3037858249
ISBN-13: 9783037858240
e-ISBN-10: 3038262056
e-ISBN-13: 9783038262053
未经允许不得转载：Wow! eBook » Gettering and Defect Engineering in Semiconductor Technology XV: Selected, Peer Reviewed Papers from the 15th Gettering and Defect Engineering in Semiconductor Technology (GADEST 2013), September 22-27, 2013, Oxford, UK