Gettering and Defect Engineering in Semiconductor Technology XV:Selected, Peer Reviewed Papers from the 15th Gettering and Defect Engineering in Semiconductor Technology (GADEST 2013), September 22-27, 2013, Oxford, UK

by: Murphy, J. D.

Publisher: Trans Tech Publishers(2013/10/7)

Edition: 1

Language: English

ISBN-10: 3037858249

ISBN-13: 9783037858240

e-ISBN-10: 3038262056

e-ISBN-13: 9783038262053