Film Deposition by Plasma Techniques:10 (Springer Series on Atomic, Optical, and Plasma Physics, 10)

by: Mitsuharu Konuma (Author)
Edition:Softcover reprint of the original 1st ed. 1992

Publication Date: 15 Dec. 2011

Language: English

Print Length: 234 pages

ISBN-10: 3642845134

ISBN-13: 9783642845130

Book Description

Plasma deposition techniques are of major importance because they can be used to produce high-quality thin films for applications in device technology. This introduction to the subject contains sufficient details of the foundations of plasma science to be useful to newcomers to the field and, at the same time, ample information about specific techniques and new results, so that established researchers will also find it of interest.