CMOS-MEMS: Advanced Micro and Nanosystems

物理学

CMOS-MEMS: Advanced Micro and Nanosystems

by: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata

Publisher: -VCH

Print length: 608

Publication Date: 2005-05-06

ISBN-10: 3527310800

ISBN-13: 9783527310807

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