CMOS-MEMS
Authors: Baltes, Henry; Brand, Oliver; Fedder , Gary K.; Hierold, Christofer; Korvink , Jan G.; Tabata, Osamu
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Publisher: Wiley(2013/3/26)
Edition: 1
Language: English
e-ISBN-10: 352767506X
e-ISBN-13: 9783527675067
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