Atomic Layer Deposition of Nanostructured Materials

Atomic Layer Deposition of Nanostructured Materials

by: Pinna, Nicola; Knez, Mato

Publisher: Wiley ( 2012-09-19 )

ISBN-13: 9783527327973

e-ISBN-13: 9783527639922

ISBN-10: 3527327975

Edition: 1

Language: English

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