Resonant Network Antennas for Radio-Frequency Plasma Sources (Iop Ebooks)
by: Philippe Guittienne (Author),Alan Howling(Author),Ivo Fuo(Author)&0more
Publisher: Iop Publishing Ltd
Publication Date: 2024/7/20
Language: English
Print Length: 501 pages
ISBN-10: 0750352949
ISBN-13: 9780750352949
Book Description
Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.
About the Author
Resonant network antennas can overcome the limitations of conventional RF plasma sources. Their intense currents at resonance are well suited for inductive coupling in novel reactor configurations. This reference text explains the complete theory of resonant antennas, from fundamental circuits to mutual partial inductance coupling with plasma, and helicon wave theory.
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