Reliability of MEMS: Testing of Materials and Devices (Advan
by: Osamu Tabata, Toshiyuki Tsuchiya, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink
Publisher: -VCH
Print length: 324
Publication date: 2008-02-15
ISBN-10: 3527314946
ISBN-13: 9783527314942