Enabling Technologies for MEMS and Nanodevices (Advanced Mic
by: Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
Publisher: -VCH
Print length: 439
Publication Date: 2004-09-03
ISBN-10: 352730746X
ISBN-13: 9783527307463