Copper Electrodeposition for Nanofabrication of Electronics Devices
by: Kondo, Kazuo; Akolkar, Rohan N.; Barkey, Dale P.; Yokoi, Masayuki
Publisher: Springer ( 2013-11-20 )
ISBN-13: 9781461491750
e-ISBN-13: 9781461491767
ISBN-10: 1461491754
Edition: 1
Language: English