Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Hardcover: 657 pages
Publisher: Elsevier Science (December 31, 2012)
Language: English
ISBN-10: 1437734839
Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS
Hardcover: 657 pages
Publisher: Elsevier Science (December 31, 2012)
Language: English
ISBN-10: 1437734839

